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Summary form only given. A novel multi-electrode dielectric barrier discharge (DBD) plasma system exhibiting active species gain is examined for the production of ozone gas and hence microelectronic substrate treatment. This species gain is achieved by having four electrode pairs in a vertical arrangement and supplying compressed air to traverse throughout the system. This forces the filamentary striations...
Summary form only given. In this paper, optical and electrical measurements of a novel multi-electrode dielectric barrier discharge (DBD) plasma system exhibiting active species gain are performed. This gain in species density is accomplished by arranging four electrode pairs vertically and forcing compressed air through their volumes. This forces the filamentary striations together through lateral...
This work investigates the ozone sensing properties of NbO2 thin films operating at room temperature. NbO2 thin films have been deposited on alumina and glass substrates provide with Cu interdigitated electrodes by the Vacuum Thermal Evaporation technique. The optical properties of NbO2 thin films were explored using CARY IE UV-Visible Spectrophotometer. The values of the optical band gap EOPT are...
Summary form only given. This paper outlines specific variations in recombination coefficients for charged particles (electrons and ions) and how these variations affect the onset of saturation of atmospheric pressure dielectric barrier discharges (DBDs). By solving continuity equations for electrons and ions, with the application of dielectric dependent boundary conditions, in conjunction with the...
Thin films of Indium-zinc-tin oxide have been prepared by Vacuum Thermal Evaporation (VTE). The sensing characteristics of these films to environmentally relevant ozone concentrations were studied at room temperature. The effects of film thickness, deposition rate and annealing were investigated. The resistance of the thin film was found to be inversely proportional to the deposition rate. The highest...
In this paper, a fluid model for the evolution of charged species in atmospheric pressure dielectric barrier discharges (DBDs) is postulated. This model incorporates previously unconsidered atmospheric reactions, outlined in the kinetic theory, and new recombination coefficients for charged particles are used to generate increasingly more accurate values for the charged species densities. Computer...
Ozone (O3) is potentially hazardous to human health and accurate prediction and measurement of this gas is essential in addressing its associated health risks. This paper presents theory to predict the levels of ozone concentration emitted from a dielectric barrier discharge (DBD) plasma for ozone sensing applications. This is done by postulating the kinetic model for ozone generation, with a DBD...
A new type of highly sensitive ozone (O3) metal oxide gas sensor has been developed. Various mixtures of ln2O3, ZnO and SnO2 were deposited on alumina substrates containing indigitated electrodes by means of vacuum thermal evaporation (VTE). Deposition rate of the sensing layer was varied from 0.3 nm/s-1.4 nm/s. The highest sensitivity of the sensors was found at a deposition rate of 1.2 nm/s-1.4...
Breakdown in dielectric layers has previously been assumed to be dependent only on the electric field strength at a certain point in the dielectric lattice [1], [2]. This does not take quantum aspects of the lattice structure into account. The present model takes into account quantum variations of particles in conjunction with different particle characteristics. Dielectric breakdown patterns are characterised...
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