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A new type of highly sensitive ozone (O3) metal oxide gas sensor has been developed. Various mixtures of ln2O3, ZnO and SnO2 were deposited on alumina substrates containing indigitated electrodes by means of vacuum thermal evaporation (VTE). Deposition rate of the sensing layer was varied from 0.3 nm/s-1.4 nm/s. The highest sensitivity of the sensors was found at a deposition rate of 1.2 nm/s-1.4...
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