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Measurable but controllable disturbances are common in industry, which drive systems away from their references and take time for feedback control to reject them, especially when the systems present input-output delays due to mechanical properties. In this paper, a novel feedforward control based on disturbance prediction is proposed. Besides, to compensate system responses to disturbance prediction...
This paper proposes a new method for automatic tuning of the Smith predictor controller based on a Repetitive Control (RC) approach. The method requires the input of a periodic reference signal which can be derived from a relay feedback experiment. A modified repetitive control scheme repetitively changes the control signal to achieve tracking error convergence. Once a satisfactory performance is...
In semiconductor manufacturing process, the thickness and extinction coefficient are two important properties of photoresist which need careful estimation and control. Wafer warpage is common in microelectronics processing due to stress induced. In this paper, the effect of warpage on the accuracy of resist properties estimation is investigated and an in-situ calibration method is proposed. We will...
The finite spectrum assignment (FSA) for delay systems has been proposed in the literature for many years, but its application has not been investigated. In this paper, several practical issues with the FSA are considered. First, a modified FSA (MFSA) is presented to achieve asymptotic tracking and regulation. Secondly, an automatic tuning technique is developed for the MFSA controllers using a...
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