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In this communication, we present strategies to implement novel or enhanced optoelectronic functionalities on silicon via the monolithic integration of functional oxides as active layers for nanophotonic devices. We focus on the use of ferroelectric oxides with naturally strong electro-optical coefficients such as BaTiO3 (BTO) on SOI for the realization of electro-optical modulators around 1.55 µm...
We present design and fabrication of a slot waveguide BaTiO3/Si Mach-Zehnder modulator. Modelling results based on anisotropic finite-difference mode solver show variation of effective index of 1.57×10−3 and a Vπ·L of 0.98 V·cm.
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