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We would like to report our approaches to realize epitaxially grown source toward high drain current in III-V MISFET. One approach is an InP/InGaAs composite channel MISFET with regrown InGaAs source/drain. When gate length of 150 nm was fabricated, Id at Vd = 0.8 V was 0.8 A/mm and maximum gm was 0.38 S/mm at Vd = 0.5 V. The other approach is vertical FET. In case of vertical FET with dual gate,...
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