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A novel vertical field plate (VFP) structure with low specific on-resistance (Ron,sp) is proposed. The VFP is inserted in the field oxide of the drift region with heavily doped N pillar parallel to the trench oxide layer (TOL), which depletes fully the drift region to decrease Ron,sp effectively and enhances the bulk field (ENBULF). The VFP optimises the bulk electric field to increase the breakdown...
The silicon microgyroscopes are very sensitive to the residual stresses, which degrade the microgyroscopes performance. This study used finite element analysis to simulate the residual stresses induced during the packaging process. The silicon microgyroscope is fabricated with SOG (silicon-on-glass) technology and packaged with ceramic packages. FEM simulation based on a simplified structure of the...
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