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Silicon samples were implanted by small mass-selected Ar n+ cluster and Ar + monomer ions with energies in the range of 1.5-18.0 keV/ion. Atomic force microscopy (AFM) shows simple and complex crater formation on the Si surface at the collision spots. A typical complex crater is surrounded by a low-height (~0.5 nm) rim and it encloses a centre-positioned cone-shaped hillock with...
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