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This paper reports on optimized fabrication technologies for electromagnetic actuator systems and their characterization. These actuators consist of three-dimensional microstructures of increasing complexity like electroplated micro coils, flux guidances, insulation and planarization layers. The microstructures are fabricated by UV depth lithography using AZ9260, electrodepositable photo resist and...
This paper reports on a micro linear motor with integrated passive magnetic guidance and the differences when designing such linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. The passive magnetic guidance could be integrated without the need of further components. Special rules resulting from the...
This paper reports on the differences designing linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. Special rules resulting from the different materials and fabrication processes is discussed and analyzed using a finite element method. As a result of the rules a linear stepping motor has been designed...
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