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We propose and analyze a notched free-standing thin-film structure subject to a well-defined stress concentration in pure tension for in situ mechanical testing of thin metal films. Load is applied electrostatically, making testing and handling routine and simple. The sensitivity of the notched structure to geometry, residual stress and to electrostatic instability are modeled and discussed. It is...
In this paper, we demonstrate the fabrication of electrostatically loaded, free-standing Al–0.5wt.%Cu thin-film samples, realizing a near-zero compliance support post. We measure Young’s modulus E=74GPa using cantilevers, in good agreement with grain texture measurements. We measure residual stress σ R ranging from 30 to 60MPa using fixed–fixed beams and find that processing induces significant...
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