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High dielectric capacitor, that has around 1000 in dielectric constant, can be successfully formed by nanotransfer on non-heat-resisting substrates. PZT film could be released from the Si substrate and bonded onto the polymer one. The releasing characteristics have the relationships with the thickness of Pt layer. The formed PZT has perovskite structure and clear columnar texture. The proposal of...
It is difficult to achieve large surface reaction area in MEMS-based fuel cell because of volume and material limits. In this work, we put forward a novel method to get large surface reaction area in MEMS-based fuel cell. The novel method consisted of the formation of fine pattern in proton exchange membrane by nanoimprint technology. We modified the surface of Nafionreg117 membrane by thermal nanoimprint...
MEMS (microelectromechanical systems) or nanotechnology is expected as one of the most promising R&D fields for the future business success, as MEMS or nanotechnology has a variety of applications from electronics to bio-technology. However R&D investment to MEMS facility is too heavy even for the large scale companies. Although MEMS foundry services by private companies have been introduced...
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