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Application of line-focus-beam (LFB) acoustic microscopy is extended to characterization of substrates for SH-type SAW devices. Theoretical and experimental studies on a wave mode for characterization are carried out on 36/spl deg/Y-cut LiTaO/sub 3/ wafers. A Rayleigh-type mode of leaky surface acoustic waves (LSAWs) must be employed instead of an SH-type mode of leaky pseudo-surface waves (LPSAWs)...
Anisotropy in velocity and attenuation of leaky surface-acoustic waves (leaky SAWs) on hot-pressed silicon nitride was measured by acoustic microscopy using the line-focus beam. On the surface normal to the pressing direction the velocity was 5651 m/s for all propagation directions, whereas on the surface parallel to the pressing direction the velocities varied markedly, depending on the wave propagation...
A nonscanning reflection acoustic microscope with a line-focus beam is applied to investigate propagation characteristics of leaky SAWs on water/LiNbO3 boundary. Experiments are performed for both cases without and with an Al-film shorting plane at the boundary of water/Y-cut-LiNbO3. The effect of water `loading? on LiNbO3 is successfully detected.
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