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Bismuth antimony telluride thin films were fabricated by a tri-target co-sputtering deposition technique on soda-lime glass. Direct current magnetron sputtering and radio frequency magnetron sputtering were both utilized. A substrate temperature of 250°C was used for the synthesis of Bi x Sb 2−x Te 3 . Thin films of different compositions were synthesized by changing the sputtering...
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