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SnOx electrode thin films for lithium ion batteries were deposited by reactive and non-reactive rf magnetron sputtering of a SnO2 target in an argon–oxygen atmosphere. Amorphous and nano-crystalline SnOx films could be synthesized, with regard to the O2:Ar volume ratio in the sputter gas which was adjusted to 0, 3.5 or 10%. Laser micro-structuring using a KrF excimer laser operating at a wavelength...
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