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This paper reports on a novel technique for realizing submicron and micron diameter SiO2 tubes on a Si substrate for biomedical applications such as, for example, patch clamps. The tube arrays have been successfully fabricated on Si substrates using a selective vapor-liquid-solid (VLS) growth method combined with MEMS techniques. The size of the tubes is typically between 0.2 mum and 2 mum in diameter...
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