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Silicon smart microchips with CMOS/MEMS technology are realized for Intelligent sensing. In our developed chips, new type sensor chips for bio-medical applications are presented especially here. One is Si microprobe electrode and tube array chips for recording of neurons in the tissue and drug deliver use. The probe array can be fabricated on IC chip, using standard IC process followed by a selective...
A fused pH and fluorescence sensor is proposed, and a prototype has been fabricated using CMOS silicon integrated circuit technology. Fluorescence intensity and pH can be detected at the same pixel for the first time. In the proposed device, a pH sensor which uses CCD image sensor technology and a filter-less fluorescence detection sensor are fused in the same pixel, enabling fluorescence and pH signals...
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