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Silicon smart microchips with CMOS/MEMS technology are realized for Intelligent sensing. In our developed chips, new type sensor chips for bio-medical applications are presented especially here. One is Si microprobe electrode and tube array chips for recording of neurons in the tissue and drug deliver use. The probe array can be fabricated on IC chip, using standard IC process followed by a selective...
A multi-modal sensor, with which was possible to simultaneously measure pH, electrical conductivity (EC) and temperature, was fabricated. The pH sensor, EC sensor, and temperature sensor were integrated using compatible complementary metal-oxide semiconductor (CMOS) logic technology on a small Si chip (area, 25 mm2). Simultaneous measurements of pH, EC and temperature were demonstrated, and the sensor...
In this study, fingertip-size integrated silicon tactile sensor-membrane for three-dimensional (3D) surface-shape imaging system has been newly developed. The sensing area is 8 mmphi-area and several-mum thickness silicon membrane. It is swollen like a balloon surface and strain sensor pixel is arrayed on it for detection of surface shape. The movable device structure is fabricated by CMOS compatible...
This paper presents the evaluation of the prototype of an integrated smart microsensor system that has been developed to monitor the motion and vital signs of humans in various environments. Integration of radio frequency transmitter (RF) technology with complementary metal-oxide-semiconductor/micro electro mechanical systems (CMOS/ MEMS) microsensors is required to realize the wireless smart microsensors...
Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully...
In this paper, a novel concept of multi-functional MEMS tactile imager using flexible deformation of silicon IC for advanced tactile sensing applications is presented. Integration design of multi-functional tactile imager with sensing abilities of contact-force, hardness and temperature distributions is totally discussed based on their measured performances. This tactile sensor has a sensing region...
In this paper, the concept and experimental results of microwave-powered silicon microsensors for distributed and embedded sensing applications are presented. This is the first report of a microsensor device integrated with RF-DC power converter on the same chip. The integrated sensors are fabricated by silicon-MEMS (Micro Electromechanical Systems) technology. This time, 'fuse-type strain detector',...
In this paper, a robust and sensitive silicon-MEMS tactile-imager which realizes scratch resistance and over-range protection is presented. This concept of tactile-imager can solve the fragility problem of sensitive structure without any protective materials, using backside silicon surface as contact-face. Also, backside contact-face is very suitable for tactile sensors since electronic terminals...
In this paper, a novel radio frequency (RF) induced power supply system for micro sensor nodes is presented. Supplied power in RF-electromagnetic wave is received and rectified in each micro sensor device. A charge pump (CP) circuit boosts up an output voltage of the received power, and stores the energy in a large capacitor. When the boost up voltage of CP circuit reaches to an arbitrary voltage,...
This paper presents the development of monolithically integrated RF transmitters and antennas for MEMS sensors such as accelerometers. Integrating wireless-communication ability on-chip microsensor, sensors can communicate the sensing data with information network by wireless. Integration technology of MEMS sensors, and RF-CMOS including RF passive components is requited to realize highly integrated...
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