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In this study, we present a hybrid wireless smart temperature sensor using thermoelectric sensor and wireless transmitter. The thermoelectric sensor using SOI structure consists of 17 pairs of n- and p-type single-crystal silicon strips and selective absorption area. The sensitivity of the fabricated thermoelectric sensor was found to be approximately 190μV/°C. The wireless transmitter consists of...
Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr0.52, Ti0.48)O3 (PZT) thin film on epitaxial γ-Al2O3/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al2O3(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF2 gas etching. The fabricated device showed polarization-electric...
A highly sensitive L-glutamate biosensor based on glutamate oxidase (GLOx) has been fabricated on N-(3-dimethylaminopropyl)-N'-ethylcarbodiimide hydrochloride (EDC) activated thioglycolic acid (TGA) self assembled monolayer (SAM) on smart-biochips, where K3Fe(CN)6 and TGA-SAM are used as a mediator and an enzyme immobilization matrix, respectively. The glutamate biosensor displayed a fast response,...
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