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Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr0.52, Ti0.48)O3 (PZT) thin film on epitaxial γ-Al2O3/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al2O3(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF2 gas etching. The fabricated device showed polarization-electric...
A piezoelectric ultrasonic hydrophone array was fabricated using diaphragm transducer on Si substrates. A two dimensional (2-D) array of 8 times 8 elements with diaphragm transducer has been developed by XeF2 etching from the topside of Si. In this paper, we describe the fabrication process of the diaphragm transducer array. A finite-element analysis (FEA) was calculated to evaluate the resonant frequency...
Miniature high sensitivity ultrasonic transducers have been fabricated using epitaxial lead zirconate titanate, Pb (Zrx, Ti1-x)O3 (PZT), thin films grown on epitaxial SrRuO3/Pt/γ-Al2O3/Si substrates. The 1.3 μm-thick PZT films were prepared by a sol-gel method. The receiving sensitivity of the fabricated transducer was measured at the frequency of 2.5 MHz. The fabricated transducer has good receiving...
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