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In this study, we propose a novel sensing device for small olfactory chips which can be installed on mobile such as smart phone. The device comprises gas-sensitive films deposited on surface potential sensor arrays, which is integrated in a single chip with the area of 7.3 mm2. The chip has 128 × 128 elements with the element size of 37.30 × 37.30 pm2. Three kinds of the gas-sensitive film were separately...
We have demonstrated for the first time a megapixel (1.3M pixels) CCD pH imager featuring a flash-injection-of-signal-electrons scheme. With a spatial resolution of 3.75μm and pH resolution of 0.16pH at 27.5fps we believe this is a promising device technology for applications such as high throughput DNA sequencing and label-free cell measurement system with sub-cell-size spatial resolution and real-time...
In this work, we fabricated lead-free pyroelectric infrared (IR) sensor array on epitaxial gamma-Al2O3/Si(100) substrates with signal processing circuit using pyroelectric (Na0.5Bi0.5)TiO3 (NBT) thin film deposited by chemical solution deposition (CSD), and we also investigated feasibility of NBT thin film in Si processes.
Integrated 32 ?? 32 pyroelectric IR sensor array in nMOS/JFET circuitry using highly (001) oriented Pb(Zr0.4, Ti0.6)O3 (PZT) thin films on epitaxial y-Al2O3/Si substrates has been fabricated on the one chip. The sensor array utilizes a sol-gel deposited PZT(001) thin film as a pyroelectric material, an n-JFET as a low noise detection device, and a micromachined membrane supported by four beams as...
In this paper, a novel concept of multi-functional MEMS tactile imager using flexible deformation of silicon IC for advanced tactile sensing applications is presented. Integration design of multi-functional tactile imager with sensing abilities of contact-force, hardness and temperature distributions is totally discussed based on their measured performances. This tactile sensor has a sensing region...
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