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This communication presents the miniaturization and the wafer level packaging (WLP) of micromachined metal-oxide (MOX) gas sensors. A combination of deep reactive ion etching of silicon(DRIE) combined with a drop coating of the gas sensitive material allows the direct WLP of the MOX sensors on silicon. Compared to the standard micromachined MOX gas sensors where the gas sensitive films are integrated...
This paper reports on the optimisation of micromachined hotplates for gas-sensing applications designed to stand high-temperature coating processes and modes of operation. Different thin film materials, geometry and dimensions have been investigated regarding their power consumption, temperature distribution over the sensing area and robustness when annealed at high temperature. In comparison with...
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