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A highly sensitive H2 gas sensor was fabricated using a microelectromechanical system (MEMS) procedure having an embedded micro-heater. The palladium-silver (Pd/Ag having stoichiometric ratios 77:23) thin film was deposited by the RF/DC magnetron sputtering and used as the hydrogen sensing layer designed as a zig-zag pattern. The working temperature of the micro heater showed a linear relation with...
While anodic bonding is commonly used in a variety of microelectromechanical systems (MEMS) applications, devices and substrates that incorporate this processing technique are often subjected to significant residual stress and curvature that create post-processing and reliability issues. Here, using an anisothermal anodic bonding procedure, residual stresses and the resulting wafer curvature in these...
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