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Wurtzite ZnBeMgO films with high magnesium content were deposited by the pulsed laser deposition method at various oxygen partial pressures. Results show that the crystallinity and the band gap of ZnBeMgO films were strongly influenced by the oxygen partial pressure. With the increase of the oxygen pressure, the crystalline structure of ZnBeMgO films changed from cubic rock-salt to hexagonal wurtzite...
The deposition rate of polymeric parylene films is shown to be a sensitive function of temperature and pressure. By keeping the substrate temperature below room temperature, we obtain more than one order of magnitude higher deposition rates than those obtained at room temperature. It is suggested that the higher deposition rates are due to the increased condensation of the monomer on the surface during...
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