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A facile and rapid method for nondestructive testing (NDT) of the Young's modulus of interconnecting thin films using a broadband surface acoustic wave‐interdigital transducer (SAW‐IDT) is presented herein. A linear periodic SAW‐IDT with 20–125 MHz is designed and fabricated to excite surface acoustic wave (SAW) signals on the samples. By applying burst excitations under different frequencies, the...
The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on the example TiO2/TiN duplex film coated on titanium alloy are investigated...
Porous low-k materials are required for the advanced 45nm node and beyond ULSI interconnect system. The deteriorative mechanical properties of the porous materials must be evaluated accurately. Surface acoustic wave (SAW) technique can measure the Young's modulus of thin films accurately and nondestructively by analyzing the dispersive characters of SAW waves' propagation. In this paper, the theoretical...
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