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A VHF plasma was produced with a ladder-shaped antenna whose driving frequency ranges up to 200 MHz and the plasma parameters were measured with a movable Langmuir probe. A very uniform plasma was achieved over 300 mm×300 mm with a driving frequency of 80 MHz. When the driving frequency was increased, the plasma density increased, amounting to 1.6×10 10 cm −3 at 200 MHz near the substrate,...
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