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To achieve high-precision dielectrophoretic (DEP) assembly of carbon nanotubes (CNTs) for nanoelectronic circuits and nanoelectromechanical systems (NEMS), a technique is investigated both theoretically and experimentally for shaping the local geometries of nanoelectrodes to control the electrohydrodynamic behavior of CNTs. Motion trajectories and positions of CNTs assembled on electrodes are predicted...
We have described and demonstrated a rigid-body tracking system suitable for use in a Scanning Electron Microscope under a variety of conditions. This system has demonstrated an ability to work with noisy images, sub-pixel resolution at a number of magnifications and the ability to track moving targets at real-time (~10 fps) frame rates. With this automated tracking system, the mechanical properties...
Nanorobotic spot welding using single-crystalline-copper-filled carbon nanotubes (CNTs) is investigated experimentally inside a transmission electron microscope (TEM). Controlled melting and flowing of copper inside nanotube shells are realized by applying bias voltages between 1.5 V and 2.5 V. The average mass flow rate of the copper was found to be 120 ag/s according to TEM video imaging (measured...
Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental,...
Dielectrophoretic assembly of individual carbon nanotube (CNT) based NEMS is experimentally realized with nanoelectrodes fabricated using electron-beam lithography. The successful manipulation and assembly of single carbon nanotubes using dielectrophoretic forces produced by nanoelectrodes lead to a higher integration of CNTs into both nanoelectronics and NEMS
The contact phase of an assembly task involving micro and nano-sized building blocks is complicated by the presence of surface and intermolecular forces such as electrostatic, surface-tension and Van der Waals forces. Assembly strategies must account for the presence of these forces in order to guarantee successful repeatable micro and nanoassembly with high precision. In this paper, a detailed model...
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