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Mn doped ZnO (ZnO:Mn) thin films with ~10at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤200°C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed...
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