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Ti and Al powders were mixed with identical atomic ratios and hot-pressed at 650, 800, 950, 1100 and 1250 o C, respectively, for the use of targets in the arc ion plating (AIP) method. As the sintering temperatures increased, the target density monotonously increased and the porosity correspondingly decreased. Chemical analysis by X-ray diffraction indicated that pure Ti and Al phases decreased...
Ti 1-x Al x N, Ti 1-x Zr x N and Ti 1-x Cr x N films were synthesized by changing the contents, x, by using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti 1-x Al x N films changed from the NaCl into wurtzite type at...
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