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Hydrogenated tetrahedral amorphous carbon (ta-C:H) is advantageous as coating material for high-density magnetic and optical storage devices, due to its favorable combination of density and smoothness. An advantage of ta-C:H over tetrahedral amorphous carbon (ta-C) is the absence of macroparticles, often found in cathodic arc deposition of ta-C, and the hydrogen rich surface, compatible with the lubricant...
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