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Si 1−x Mn x diluted magnetic semiconductor films were deposited on p-type Si(100) substrate by radio frequency magnetron sputtering method. Post thermal annealing was performed in an argon atmosphere at 1073K for 300s and at 1473K for 120s. The as-grown sample exhibits ferromagnetism at room temperature. Ferromagnetism is enhanced after annealing treatment. High resolution transmission...
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