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In this work, we present the impact of standard CMOS-based patterning techniques and more specifically the impact of strip chemistries on the electrochemical behavior of TiN electrodes. As TiN is a material that is both CMOS- and biocompatible, these electrodes are of interest for in vitro and in vivo biomedical applications to interface with electrogenic cells. When scaling down the TiN electrodes...
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