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A convective accelerometer is an accelerometer, which contains neither a solid proof mass nor moving components. It mainly consists of heaters and thermal sensors which measure temperature differences caused by free convection due to an input acceleration. In this paper, we report a complete dual-axis micromachined convective accelerometer with high sensitivity and an effective microfabrication process...
We designed and fabricated a novel microscale sensor for monitoring the motion of the gas-liquid interface in microchannels, based on the 3omega thermal-analysis method. As the sensor employs an AC hot-film technique to probe the movement of phase interface, it is more sensitive and noise-resistant than the already developed DC technique. The sensor is composed of a thin-film heater integrated into...
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