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This paper introduces the operation concept, fabrication and feasibility of the MEMS digital accelerometer using a microscale liquid-metal (LM) droplet in a microstructured glass channel formed by a photosensitive (PS) glass. Our device employs the advantageous properties of the LM droplet (i.e., high surface tension, high density and electrical conduction) and the PS glass (i.e., photo-definable...
A convective accelerometer is an accelerometer, which contains neither a solid proof mass nor moving components. It mainly consists of heaters and thermal sensors which measure temperature differences caused by free convection due to an input acceleration. In this paper, we report a complete dual-axis micromachined convective accelerometer with high sensitivity and an effective microfabrication process...
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