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This paper reports the deposition of amorphous diamond-like carbon (DLC) films on Si 〈100〉, using a low energy (1.45kJ) dense plasma focus. The high purity graphite is inserted at the tip of the tapered anode, which serves as a carbon source. Silicon substrates are placed in front of the anode tip at different axial and angular positions. The films are deposited using multiple focus shots. Raman spectroscopy...
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