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Sputtering yields of iron and titanium cathodes have been measured over wide ranges: (0.1 < p < 0.373 mbar) and (0.25 < j d < 1 mA/cm 2 ) of oxygen pressure (p) and current density (j d ) of the O 2 /Fe discharge. The effective sputtering yields Y efs run from 0.0017 up to 0.136 [A Fe /A O ]. These yields are very low if compared...
Rozpylanie mosiężnej katody w wyładowaniu jarzeniowym w tlenie badano eksperymentalnie i modelowano metodą elektrodynamiki molekularnej. Szybkości ret[nm/s] trawienia katody zmierzone przy stałych parametrach wyładowania, gęstości prądu jd= 0,5 mA/cm2i długości Lcf= 2 cm obszaru katodowego spadku potencjału, dla różnych zestawów gaz - katoda są następujące: ret(Ne→brass) = 1,68, ret(N₂ →brass) = 0,622,...
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