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The space close to a cathode of a low-pressure glow discharge (~15Pa) is a reservoir of sputtered atoms in the gaseous phase and that seems to be an effective source of optical lines of buffer gas as well as those of sputtered solid. The dependence of line intensity on discharge parameters (gas pressure, current density) are well qualitatively explained by the phenomenological modelling, where characteristics...
In the paper experimental, as well as theoretical studies of sputtering yield of the Ti and Fe cathode under irradiation by nitrogen and neon glow discharge plasma are presented. The experimentally measured efficiency of the metallic cathode sputtering by neon plasma is four times higher than that of the sputtering by nitrogen plasma, despite the similarity of energy-flux characteristic of both plasmas...
The results of experimental and theoretical studies of the processes affecting the plasma-cathode surface interface of N 2 /Fe and Ne/Fe dc discharges are presented. The model permits an explanation of the characteristics of the plasma light emission and its dependence on discharge current density, gas pressure and other properties. Emission of molecular lines is concluded to be due to electron...
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