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Sputtering yields of iron and titanium cathodes have been measured over wide ranges: (0.1 < p < 0.373 mbar) and (0.25 < j d < 1 mA/cm 2 ) of oxygen pressure (p) and current density (j d ) of the O 2 /Fe discharge. The effective sputtering yields Y efs run from 0.0017 up to 0.136 [A Fe /A O ]. These yields are very low if compared...
Experimental and theoretical studies of the luminescence of cathode zone of Ne/(Fe cathode) glow discharges are reported. The dependence of line intensity I(λ) on the discharge parameters (gas pressure p, current density j d and position x) was experimentally investigated by optical emission spectrometry (OES). The measured characteristics I(λ)=f(p, j d , p, x) were discussed based...
The measurements of sputtering of mono-element cathodes as well as alloys in glow discharges created in both rare and molecular gases at extremely different gas pressures and discharge current densities are presented. The measured efficiency of sputtering of all cathodes by neon plasma is higher than that for nitrogen plasma. The sputtering of brass cathode is more extensive than that of mono-cathode...
Nitrogen dissociation in the cathode region of glow discharges was studied theoretically by Monte-Carlo simulation and experimentally by optical emission actionometry of lines emitted by atomic and molecular species of this region plasma. In the ranges 0.13–1.3hPa and 0–0.5mA/cm 2 of gas pressure and current density, dissociation rates of the negative glow plasma seem to be low at the level...
The space close to a cathode of a low-pressure glow discharge (~15Pa) is a reservoir of sputtered atoms in the gaseous phase and that seems to be an effective source of optical lines of buffer gas as well as those of sputtered solid. The dependence of line intensity on discharge parameters (gas pressure, current density) are well qualitatively explained by the phenomenological modelling, where characteristics...
In the paper experimental, as well as theoretical studies of sputtering yield of the Ti and Fe cathode under irradiation by nitrogen and neon glow discharge plasma are presented. The experimentally measured efficiency of the metallic cathode sputtering by neon plasma is four times higher than that of the sputtering by nitrogen plasma, despite the similarity of energy-flux characteristic of both plasmas...
The Monte Carlo computer code for the determination of the spatial distribution of atoms sputtered from the cathode material is presented. The code calculates the trajectories of sputtered particles in the plasma region assuming their neutral charge status during the whole path, which means that only scattering by plasma gas particles is taken into account in this model. The Moliere approximation...
The results of experimental and theoretical studies of the processes affecting the plasma-cathode surface interface of N 2 /Fe and Ne/Fe dc discharges are presented. The model permits an explanation of the characteristics of the plasma light emission and its dependence on discharge current density, gas pressure and other properties. Emission of molecular lines is concluded to be due to electron...
Energy distributions of N + and N 2+ ions bombarding the aluminium cathode of a glow discharge at high current densities (few mA cm -2 have been calculated and compared with experimentally determined values. The results show a high proportion of N + compared to (N 1+ + N 2+ ) which are characteristic of a nitrogen discharge and arise...
In the paper the XPS measurements of aluminium samples implanted with low energy, high dose nitrogen ions are presented. The experimental results are compared with those obtained from a Monte-Carlo computer simulation. The influence of collisions atomic mixing and ion-bombardment-induced segregation on the distortion of the measured depth profile of implanted ions is discussed.
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