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In this study we extend our work on low-power CMUT chemical sensors from a single element to an array as a way to improve selectivity to volatile organic compound (VOC) analytes. A single channel of our sensor array comprises of a polymer-functionalized CMUT resonator in the feedback loop of a Colpitts oscillator, which consumes 0.76 mW, when operated continuously. Using our anodic-bonding based fabrication...
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