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In this paper, a novel hollow micro-disk mass sensor based on mode generation and degeneration principle is presented, which has the advantages of self-compensating environmental fluctuation and eliminating viscous damping as vacuum packaged. The device configuration, including the width of support beams, the channel height and the allocation of the sensing piezoresistors are carefully analyzed and...
Flexible resonant terahertz metamaterials built on ultrathin highly flexible polyimide substrates have been designed, fabricated and measured. Our results provide a path forward for creating multi-layer non-planar metamaterials at terahertz frequencies.
We present the design, fabrication and characterization of a highly flexible metamaterial absorber that experimentally obtains an absorptivity of 0.96 at 1.6 THz and operates over wide angular range for transverse electric and transverse magnetic radiation.
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