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In this work, we propose a novel temperature compensation method that utilizes a tri-mode operation scheme to generate a temperature-stable frequency reference over a large temperature range. Three resonant modes are excited simultaneously on a highly doped silicon MEMS resonator, and the unique TCf characteristic of each mode is fitted to a parabolic curve. A linear combination of the three frequencies...
This work demonstrates a unique temperature-compensated differential resonant accelerometer fabricated in a wafer-scale encapsulation process. By utilizing a pair of ultra-stable, high quality factor (>50,000) resonant beams as a strain gauge, we show differential operation with a scale factor of 427Hz/g and a bias instability of 0.16μg at 21s integration time. Furthermore, matched temperature...
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