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Recently, much work has been done to study hydrogen behavior on solid surfaces for applications in fuel cells, semiconductor devices, and diamond-like carbon films. We have developed a hydrogen microscope making use of electron stimulated desorption (ESD) spectroscopy. A thermal-field emission type electron gun set to a low-energy range (<1keV) is used to obtain a beam size less than 100nm in diameter...
A scanning electron-stimulated desorption (ESD) ion microscope (SESDIM) measured the 2-D images of hydrogen and oxygen distribution on solid surfaces. A primary electron beam at 600eV, with a pulse width of 220ns, resulted in ion yields of H + and O + . This SESDIM is applied to the surface analysis of Porous-Si (Po-Si) partially covered with SiN films. During the heating of a specimen...
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