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We present experimental and simulation results of Si self-diffusion and B diffusion in SiO 2 formed directly on Si substrates by thermal oxidation. We show that both Si and B diffusion in SiO 2 are enhanced by SiO generated at the Si/SiO 2 interface and diffusing into SiO 2 . We also show that the existence of high-concentration B in SiO 2 enhances SiO diffusion,...
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