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This paper presents series three-axis micro-force sensors which are based on piezoresistive effect. The structure of these sensors include two critical parts, one central mesa suspended by four single-crystal-silicon sensing beam and one quartz optical fiber probe with ladder structure. By changing the length of the probe, we can get series sensors with different sensitivety and measurement range...
This paper presents a three-component force sensor with MEMS gauges attached to its sensitive beams, which could be monolithically machined without assembly. All the sensitive areas of the dynamometer are designed on outer surfaces, which could contribute to the bond of gold wires onto the MEMS chips. Rough theoretical models are abstracted based on Euler beam theories, and Wheastone bridge circuits...
We present a micro resonant acceleration sensor based on the frequency shift of quartz double ended tuning fork (DETF). The two stiff ends of DETF are mounted on proof mass and temperature isolator structure of silicon support, respectively. Electrodes are coated on the four surfaces of the resonant beam to excite anti-phase vibration model to balance inner stress and torque. Stress in DETF beam shifts...
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