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Ordered arrays of nanoporous Si nanopillars and Si nanopillars with nanoporous shells were fabricated using a combination of nanoimprint lithography and metal-assisted chemical etching. They show visible luminescence with an overlap of 2 red emission bands at room temperature. Nanoporous Si nanopillars are formed in highly doped p-Si after metal-assisted chemical etching, while Si nanopillars with...
The fabrication of ordered arrays of nanoporous Si nanopillars with and without nanoporous base and ordered arrays of Si nanopillars with nanoporous shells are presented. The fabrication route is using a combination of substrate conformal imprint lithography and metal-assisted chemical etching. The metal-assisted chemical etching is performed in solutions with different [HF]/[H2O2 + HF] ratios. Both...
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