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This paper presents design and analysis of a z-axis tuning fork gyroscope. The sensor is designed to reduce noises and improve the sensitivity by using a drive coupling spring in the lozenge shape. The in-phase sensing mode is suppressed by using a self-rotation ring. The designed sensor prioritizes anti-phase driving and sensing modes. The frequencies of anti-phase driving and sensing modes are far...
This paper describes a silicon micro robot system (MRS) that is capable of driving micro-cars in different directions based on a ratchet mechanism and electrostatic comb-drive actuators. Lateral movement of the ratchet racks makes the micro-car move in the perpendicular direction with different velocities. Based on MEMS technology, the MRS described in this article was fabricated from a silicon on...
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