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Stiction, which results from contact between surfaces, is a major failure mode in microelectromechanical systems (MEMS). Indeed, microscopic structures tend to adhere to each other when their surfaces come into contact and when the restoring forces are unable to overcome the interfacial forces. Since incidental contacts cannot be completely excluded and since contacts between moving parts can be part...
Stiction is a major failure mode of MEMS as microscopic structures tend to adhere to each other when their surfaces enter into contact. Although increasing the restoring forces of switch devices could overcome the stiction effect, this is not practical, as in turn, it also increases the actuation voltage. Therefore stiction prediction is important to be considered when designing micro- and nano- devices...
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