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Nanocrystalline ZrN films were successfully deposited on Si(100) and AISI 304 stainless steel substrates using hollow cathode discharge ion-plating (HCD-IP). The effect of nitrogen flow rate (ranging from 5 to 35sccm) was investigated on the N/Zr ratio, structure, and mechanical properties of the ZrN films. The results showed that the variation of nitrogen flow rate did not significantly affect the...
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