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High quality ZnO epilayers (χ min ∼10%) were prepared on Al 2 O 3 (0001) substrates at a temperature of 750°C by pulsed laser deposition (PLD) with oxygen pressure of 0.015, 0.15, 1.5, and 15Pa. The best crystalline quality and strongest intensity of UV photoluminescence were observed on ZnO layer with oxygen pressure of 15Pa. It is probable due to the higher oxygen pressure...
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