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Miniature fluid pumps, measuring 15x4x1 mm, have been microfabricated with silicon, glass, and polyimide. Pumps have been tested with deionized water and 10% glycerol solutions as the working solutions. The pumps have been operated with a pneumatic drive or a piezoelectric drive. Flow rates from 0.1 to 110 μl min -1 have been achieved. The maximum pressure generated by the pumps was 56...
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