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A SnO 2 -based semiconductor thick film gas sensor was fabricated for detection of chlorinated volatile organic compounds (VOCs) such as dichloromethane (DCM), trichloroethylene (TCE) and 2-chloroethylethylsulfide (CEES) at concentrations of 10, 20 and 10ppm respectively with temperatures ranging from 100 to 400°C. Other semiconductors such as ZnO, CuO in 5.0wt% and Sm 2 O 3 ...
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