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The iron(III) β‐diketonate Fe(dpm)3 (dpm = 2,2,6,6‐tetramethyl‐3,5‐heptanedionate) is investigated as precursor for the thermally‐assisted chemical vapor deposition (CVD) of hematite (α‐Fe2O3) nanostructures. To this aim, the compound gas‐phase reactivity is first elucidated by in‐situ infrared spectroscopy both under N2 and N2 + O2 atmospheres. Subsequently, Fe(dpm)3 is tested in CVD experiments...
Fe2O3 nanostructures are fabricated on Si(100) and SiO2 by plasma enhanced (PE)CVD from a FeIIIβ‐diketonate precursor. Depositions are carried out in Ar‐O2 plasmas, devoting particular attention to the influence of growth temperature (from 60 to 400 °C) on material chemico‐physical properties. Remarkably, high purity, single‐phase α‐Fe2O3 nanostructures are obtained at temperatures as low as 60 °C...
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